March 17, 2021 – March 19, 2021
ECI Technology supplies fully qualified chemical metrology for sub-10nm nodes to leading foundry, IDM, and equipment suppliers in the semiconductor industry. ECI will display its Process Chemical Monitoring Systems that interface with advanced cleaning and etch tools as well as customized control solutions for new and established processes.
Hall N1, Booth # 1141
Shanghai New International Convention Center, Shanghai, China