Built upon the proven QUALI-FILL Chemical Management System, LIBRA “K” Series incorporated the latest technologies in delivering fully automated online chemical metrology and smart dosing capabilities to TSV and WLP applications.
QUALI-FILL LIBRA “K” Series systems target the needs of advanced packaging with a superior analytical performance at a significantly reduced cost-of-ownership. LIBRA “K” Series systems feature a modular design for analyzing TSV, RDL, Pillar, Bump, and UBM processes.
LIBRA “K” Series features a new Automatic Standard Generator (ASG) and Analyzer Health Monitor (AHM) enable self-monitoring and alerts for PM and parts replacements when necessary. LIBRA is designed to provide a level of autonomous control with maximized reliability and up-time, giving customers the best ease of use and performance.
Watch this presentation to learn more about the QUALI-FILL® LIBRÅ Chemical Monitoring System.
- Comprehensive analysis of all components
- Complete solution with intelligent dosing and precision control
- Automatic Standard Generation (ASG), validation and calibration
- Analyzer Health Monitor (AHM) for predictive maintenance
- Bath Health Monitor (BHM) for yield improvement
- By-product/contamination monitoring and control
- Latest software, hardware, optimized delivery system
| Plating Bath | Component | Accuracy | Repeatability |
|---|---|---|---|
| Electrolytic Applications | |||
| Copper | Cu | 3% | 3% |
| Chloride | 3% | 2% | |
| Sulfuric Acid | 3% | 2% | |
| Accelerator | 5% | 4% | |
| Suppressor | 5% | 4% | |
| Leveler | 5% | 4% | |
| SnAg | Sn | 5% | 3% |
| Ag | 5% | 4% | |
| Acid | 4% | 3% | |
| Additives | 5% | 4% | |
| Complexer | 5% | 4% | |
| Ni | Ni | 3% | 2% |
| Anode Activator | 3% | 2% | |
| Boric Acid | 3% | 2% | |
| Wetting Agent | 5% | 4% | |
| pH | 0.1pH | 0.05pH | |
| Au | Au | 5% | 5% |
| SO3 | 5% | 4% | |
| Specific Gravity | 0.01g/cm3 | 0.01g/cm3 | |
| pH | 0.1pH | 0.1pH | |
