QUALI-DOSE® Automatic Chemical Replenishment System
Seamless integration with ECI analyzers deliver precise doses of replenishing solutions for complete chemical process control
The Quali-Dose® system maintains accurate plating bath chemical concentrations by delivering precise doses of replenishing solutions. The system replenishes critical components in the bath. The optional feed and bleed feature can reduce breakdown products as well as keep the plating tool volume constant. The Quali-Dose system added to the Quali-Fill analyzer create a comprehensive online chemical management system – the industry’s most powerful complete chemical management solution to ensure a consistent environment for every wafer.
- Make up, replenishment, bleed and feed options
- Reconfigures easily for different chemistries
- Supports multiple chemistries and multiple tanks
- Install on fab floor or sub-fab
- Superb performance using Positive Displacement metering pumps
- Unique, patent-pending solution for Boric Acid control
- Use for any wet process
- Supports NOWPak® containers
Flexible Dosing Options
- Amp/min or Surface Area or Process Time or MTO
- Time proportional
- Based on analysis results
- Manual mode for any component
- Adaptive proportional dosing algorithms based on analysis results
- Fractional combination of different algorithms
