ECI Technology | We Keep Your Chemistry Right
Leading Provider of Chemical Management Systems for Semiconductor, PV, and PCB Industries
ECI Technology will be participating in the IITC 2022 conference in San Jose. We will present “Express Metrology for sub 7nm Copper and Cobalt Damascene Plating Baths” during the event.
Hope to see you there!
Feb. 9, 2022 – Feb 11, 2022
Seoul, Korea
SEMICON Korea is the premier event for the Korean semiconductor and electronics manufacturing supply chain. The exhibition will showcase the latest semiconductor materials, equipment, and related technologies.
ECI Technology is supplying fully qualified chemical metrology for sub-10nm nodes to leading foundry, IDM, and equipment suppliers in the semiconductor industry. ECI Technology will display its Process Chemical Monitoring Systems that interface with advanced cleaning and etch tools as well as customized control solutions for new and established processes.
ECI Technology will feature its new proprietary QualiLab Elite® plating-bench chemical analyzer and ECI’s Chempack® computer software/parameters for chemical analysis.
ECI Technology Booth # B818
Tin-lead deposits provide excellent performance for bumping applications. However, this coating is being phased out because of environmental concerns. The two main commercial alternatives to tin-lead processes are pure tin and tin-silver. Recently similar formulations were released by a number of chemical suppliers. Compared to the Tin-lead process, there are additional components as well as new challenges for metrology. This presentation describes some of the analytical methods required for this project.
Analysis of Acid and Tin remained mainly the same as for the Tin-Lead process. Standard acid-base and red-ox titration provide good accuracy and reproducibility of analysis.
Silver can be determined by AA, but this method cannot be easily automated. Traditional titration or spectrophotometric methods for silver does not work in presence of complexer. We were able to overcome this obstacle by use of masking reagent.
Proper operation of the bath requires an excess of complexer, so that 100% of silver ions are complexed. We developed a unique titration method in which the position of knee-point on titration indicates the concentration of free complexer.
In order to control grain size, suppressive agents (grain refiner, surfactant, or both) are used. CVS method is at it best for such analysis. All of these analysis are available in QualiLab Elite. Analysis time 5-10 min. Accuracy 5-10%. Reproducibility within 5%.
